№ files_lp_3_process_9_62668
This document provides a step-by-step guideline for spin coating, exposing, and developing AZ nLOF 2020 resist on 100 mm substrates, intended as a template for photolithography processes.
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Topic: Photolithography process
Document type: Process flow
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Target audience: Engineers, Researchers
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Price: 8 / 10 USD
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