№ lp_1_2_03711
The document outlines a roadmap for the future of metrology in semiconductor devices and systems, highlighting emerging measurement challenges and potential solutions for new materials, processes, and device architectures in the semiconductor industry.
Year: 2023
Region / City: Global
Topic: Metrology
Document Type: Report
Organization / Institution: IEEE
Author: Multiple contributors (including Ravikiran Attota, Carlos Beitia, Bryan Barnes, and others)
Target Audience: Researchers, equipment manufacturers, metrologists, standards organizations
Period of Validity: N/A
Approval Date: N/A
Date of Last Update: N/A
Price: 8 / 10 USD
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