№ lp_2_1_33937
The report presents the design and testing of a vibration isolation system for vacuum pumps used in microchip fabrication, focusing on reducing vibration interference in sensitive manufacturing equipment.
Year: 2011
Region / City: Portland, Oregon
Topic: Vibration Isolation System
Document Type: Final Report
Organization / Institution: Portland State University, Maseeh College of Engineering and Computer Science
Author: Mark Romeo, Bree DeArmond, Ron Pahle, Khoa T. Tran, Duc M. Le, Thanh Q. Nguyen
Target Audience: Engineers, Researchers, Manufacturers, Academics
Period of Action: 2011
Approval Date: June 6, 2011
Date of Changes: None specified
Price: 8 / 10 USD
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