№ files_lp_4_process_3_097695
This document presents the fabrication and characterization process of nanographite-based MEMS resonators, focusing on geometric design to prevent buckling in micromachined structures.
Year: 2026
Region / city: Southampton, UK; Singapore; Johor, Malaysia
Field: Nanotechnology, MEMS/NEMS
Document type: Research Paper
Institution: University of Southampton, A*STAR
Authors: S.J. Fishlock, S.J. O’Shea, J.W. McBride, H.M.H. Chong, S.H. Pu
Target audience: Researchers, Engineers, Academics
Period of validity: Not specified
Approval date: Not specified
Date of changes: Not specified
Keywords: Nanographite, MEMS, NEMS, resonators, microfabrication, PECVD, buckling, material characterization
Note: Contextual description
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