№ files_lp_3_process_7_095181
File format: docx Character count: 20528 File size: 1171 KB
Comprehensive laboratory safety procedure outlining hazards, handling requirements, emergency response measures, storage conditions, engineering controls, and waste disposal practices for hydrofluoric acid and buffered oxide etch in research laboratory settings.
Department: Choose a department
Principal Investigator: PI name
Group Safety Coordinator/Lab Manager: Name of safety contact
SOP written by: CoE SOP Committee
Date of this version: Not specified
Date approved by PI/Lab Supervisor: Not specified
Type of SOP: Hazardous material
Chemical Substances Covered: Hydrofluoric acid (HF), Buffered Oxide Etch (BOE), ammonium fluoride, sodium fluoride, ammonium hydrogen difluoride
Hazard Classification: Corrosive, highly toxic
Intended Use: Research laboratories
Required Approval: Principal Investigator
Required Training: Hands-on laboratory safety training
Required Equipment: Chemical fume hood, emergency shower, eye wash, calcium gluconate kit
Storage Requirements: Separate from bases and incompatible materials; not in glass containers
Document Sections: Purpose, Key Points, Hazard Awareness, Emergency Response, Storage, Work Practices and Engineering Controls, PPE, Detailed Procedures, Waste Disposal, Training Record
Institutional Context: Laboratory Safety Manual and Chemical Hygiene Plan
Price: 8 / 10 USD
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Standard Operating Procedure for Piranha Solution (Piranha Etch)
Year: Not specified
Region / City: Not specified
Topic: Chemical safety, laboratory procedures
Document type: Standard Operating Procedure
Agency / Institution: Not specified
Author: Not specified
Target audience: Laboratory personnel, researchers handling hazardous chemicals
Effective period: Not specified
Approval date: Not specified
Date of changes: Not specified
Session 1: Selective etch requirements for the next generation of semiconductor devices
Year: 2026
Region / City: Global
Topic: Semiconductor device fabrication
Document Type: Conference agenda
Organization / Institution: imec, GLOBALFOUNDRIES, CEA-Leti, Univ. of North Texas, Technic France, Toshiba, Avantor, Versum, Kurita, Entegris, Hilltop Economics LLC, Hanyang University, Dupont, QuantumClean, Air Liquide
Author: Various presenters from academia and industry
Target Audience: Semiconductor manufacturing professionals, engineers, researchers
Date of Approval: 2026
Date of Changes: None
Period of Activity: 2026
Description: Agenda for a technical conference discussing various semiconductor fabrication processes and challenges, including etching, cleaning, and surface preparation for advanced nodes.
Standard Operating Procedure for Hydrofluoric Acid (HF)
Note: Year
Subject: Chemical Safety, Laboratory Procedures
Document Type: Standard Operating Procedure (SOP)
Target Audience: Laboratory Personnel
General Use Standard Operating Procedure (SOP) for Hydrofluoric Acid (HF)
Year: 2023
Region / City: United States
Subject: Chemical Safety
Document Type: Standard Operating Procedure (SOP)
Organization / Institution: WSU
Author: Not specified
Target Audience: Laboratory staff, researchers
Effective Period: Ongoing
Approval Date: Not specified
Amendment Date: Not specified
Hydrofluoric Acid Safety Training SOP
Year: 2026
Region / City: Gainesville, FL
Topic: Chemical Safety
Document Type: Safety Procedure
Organization / Institution: University of Florida
Author: Environmental Health & Safety (EH&S)
Target Audience: Laboratory Personnel
Effective Period: Indefinite
Approval Date: 2026-02-07
Review Date: Every 2 years
Revision Date: N/A
Description: A standard operating procedure detailing safety precautions, training requirements, and emergency contact information for laboratory use of hydrofluoric acid.
Hydrofluoric Acid Neutralizer Use for Small Spills
Year: 2022
Region / City: Not specified
Topic: Hydrofluoric acid spill response
Document Type: Instructional guide
Organization / Institution: Office of Environmental Health & Safety (OEHS)
Author: Not specified
Target Audience: Laboratory personnel
Effective Date: 10/12/2022
Date of Changes: Not specified
Expiration Date: Two months before noted date on neutralizer bottle
Topics: Buffered Etch Hydrofluoric