№ lp_2_3_46669
This research paper discusses the application of electron probe microanalysis (EPMA) for the analysis of thin films, focusing on the development of a modern software tool to quantify composition and thickness of thin films using the φ(ρz) model.
Year: 2026
Region / city: Madison, WI, USA
Topic: Thin film analysis, electron probe microanalysis
Document type: Research article
Organization / institution: University of Wisconsin
Author: Aurélien Moy, John Fournelle
Target audience: Researchers in geoscience and material science
Period of validity: 2026
Approval date: 2026
Modification date: Not provided
Price: 8 / 10 USD
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